UHV PLD RHEED system with laser heating.

IOP Czech academy of Science, Prague, Czech Republic.

TSST installed an elaborate UHV PLD RHEED system with laser heating at FZU, Prague.

"the system is placed on a bake-out table for thorough bake out with a bake out tent, ensuring 10-10mbar UHV base pressure."

HIGHLIGHTS

The system is equipped with RHEED, laser and resistive heating, and prepared for possible upgrades including ellipsometry and evaporation sources.

  • Bake out table for UHV
  • Laser heating
  • Prepared for ellipsometry and evaporation sources