demcon-tsst-collaboration

LCVD system.

National University of Singapore, Singapore.

TSST in collaboration with Coherent developed this unique custom designed CVD system, handling up to 10x10 mm substrates.

HIGHLIGHTS

TSST developed the full CVD gas handling hardware and software control, ensuring full control over all steps during the CVD process, taking into account all required and necessary safety features.

  • Laser chemical vapor deposition system
  • Connected to a Coherent excimer laser setup
  • Handling of up to 10×10 mm substrates
LCVD-system-singaporejpg

explore more cases.