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  3. PLD system prepared for RHEED, AES.

PLD system prepared for RHEED, AES.

University of Southern California, USA.

HIGHLIGHTS

The highly customized chamber design of this oxide PLD system solution allows future upgrade with RHEED and several other techniques including AES probe.

  • Shared optics with 2 other TSST systems
  • Prepared for future connection to RHEED, AES probe
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"a custom designed laser beamline connects the excimer laser with two existing TSST systems and this PLD setup. "

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