demcon-tsst-collaboration

linear transfer line.

DTU, Lyngby, Denmark.

At DTU Denmark TSST installed a 6 meter linear transfer line connecting three TSST PLD systems and a sputter system.

highlights

  • Vacuum level is 10-9mbar
  • Connecting four systems, six in total possible
  • Motorised movement
  • TSST heaters, target carousels and flag-style plate compatible

This linear transferline is compatible with TSST resistive heaters, TSST target carousels and equipped with a storage facility holding TSST heaters, target carousels and flag-style sample plates. The system comes with a vacuum suitcase which can be connected to the transfer chamber for transfer of flag-style sample plates.

The operational vacuum level is 10-9mbar.

Movement of the trolley inside the transfer line is motorised, with switches and indicators at the various systems for quick and easy heater and target carousel transfer.

showcase-tsst-linear-transfer-line

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