PLD system prepared for RHEED, AES.

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University of Southern California, USA.

HIGHLIGHTS

The highly customized chamber design of this oxide PLD system solution allows future upgrade with RHEED and several other techniques including AES probe.

Shared optics with 2 other TSST systems

Prepared for future connection to RHEED, AES probe

PLD system prepared for RHEED, AES.

"a custom designed laser beamline connects the excimer laser with two existing TSST systems and this PLD setup. "

HIGHLIGHTS

wafer scale PLD system.

UHV PLD RHEED system with laser heating.

LCVD system.

PLD system cluster.