PLD system prepared for RHEED, AES.

University of Southern California, USA.

"a custom designed laser beamline connects the excimer laser with two existing TSST systems and this PLD setup. "


The highly customized chamber design of this oxide PLD system solution allows future upgrade with RHEED and several other techniques including AES probe.

  • Shared optics with 2 other TSST systems
  • Prepared for future connection to RHEED, AES probe