LCVD system.

National University of Singapore, Singapore.

TSST in collaboration with Coherent developed this unique custom designed CVD system, handling up to 10x10cm substrates.


TSST developed the full CVD gas handling hardware and software control, ensuring full control over all steps during the CVD process, taking into acount all required and necessary safety features.

  • Laser chemical vapor deposition system
  • Connected to a Coherent excimer laser setup
  • Handling of up to 10×10 mm substrates
  • "the software allows to program scanning patterns of the large sample with respect to the excimer laser beam to activate surfaces."