demcon-tsst-products-PLD

pulsed laser deposition.

We are specialized in the design and production of customized, thin-film deposition equipment, with a focus on pulsed laser deposition (PLD). Our pulsed laser deposition systems ensure the best flexibility for RHEED studies and parameter reproducibility designed for thin-film research at the atomic level. Our systems are ideally suited and field proven for research on a large variety of materials, including complex oxides, from small to large area samples and wafer platforms.

Click here for brochure "Pulsed Laser Deposition"Click here for brochure "Waferscale Pulsed Laser Deposition"

highlights

  • Single monolayer growth control with RHEED
  • Down to 5.0×10-10 mbar base pressure
  • Up to 1100°C growth temperature
  • Integration of other PVD techniques
  • Remote support, service and on site training by TSST engineers

PLD systems and components.

Customized design and integration
Systems are adapted and integrated to existing beamlines, characterization tools and cluster setups, compatible with standard sample platforms such as flagstyle sample plates. We are experienced with the integration of other deposition equipment in a PLD system solution, including sputtering, evaporators and ion sources.
Customized cluster setups
One laser, multiple systems, PLD combined with other PVD systems.

explore all products.

deposition equipment

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vacuum transfer line

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