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  3. Tubitak - uhv pldsystem with rheed, combi heating stage and tsp pump
Tubitak

UHV PLD system with RHEED, combi heating stage and TSP pump.

For TÜBİTAK, we designed and installed an ultra-high vacuum pulsed laser deposition (PLD) system equipped with in-situ RHEED analysis. The system combines advanced process control, flexible substrate heating options, and a cleanroom-integrated loadlock to support high-quality thin-film research and development.

technical highlights.

  • UHV PLD system with integrated RHEED
  • Base pressure below 1 × 10⁻⁹ mbar
  • Titanium sublimation pump (TSP)
  • Combi-heating stage with resistive and laser substrate heating
  • Cleanroom-integrated loadlock
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looking to advance your thin-film research?

Whether you are developing new functional materials, scaling a deposition process, or building a custom thin-film research platform, Demcon TSST can help translate complex requirements into reliable and high-performance equipment.

Our team combines expertise in vacuum technology, thin-film deposition, automation and system integration to create solutions tailored to your research or development goals.

Interested in discussing your challenge? We'd be happy to explore the possibilities with you.

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