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  3. Chalmers - UHV PLD-RHEED system with ozone-assisted deposition
Chalmers University of Technology

UHV PLD-RHEED system with ozone-assisted deposition.

We designed and installed an ultra-high vacuum PLD-RHEED system for Chalmers University of Technology. The system combines advanced thin-film deposition capabilities with in-situ surface analysis, ozone-assisted processing, and laser heating to support cutting-edge materials research.

technical highlights.

  • UHV PLD-RHEED system
  • Base pressure below 1 × 10⁻⁹ mbar
  • Titanium sublimation pumping (TSP)
  • Integrated ozone generator
  • Laser heating
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looking to advance your thin-film research?

Whether you are developing new functional materials, scaling a deposition process, or building a custom thin-film research platform, Demcon TSST can help translate complex requirements into reliable and high-performance equipment.

Our team combines expertise in vacuum technology, thin-film deposition, automation and system integration to create solutions tailored to your research or development goals.

Interested in discussing your challenge? We'd be happy to explore the possibilities with you.

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