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DIFFER

PLD system cluster consisting of two PLD systems, sputtering chamber and transferline.

To support advanced materials research, DIFFER required a versatile thin-film deposition platform. Demcon TSST developed and installed a custom vacuum cluster combining two PLD systems and a sputtering chamber  connected by a vacuum transferline.

technical highlights.

  • Hexapod wafer stage with 6 degrees of freedom
  • Multiple in-situ diagnostic systems
  • Temperature uniformity better than ΔT < 1%
  • Operation up to 1000°C (4-inch) and 1200°C (1-inch)
  • Vacuum-connected process chambers
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looking to advance your thin-film research?

Whether you are developing new functional materials, scaling a deposition process, or building a custom thin-film research platform, Demcon TSST can help translate complex requirements into reliable and high-performance equipment.

Our team combines expertise in vacuum technology, thin-film deposition, automation and system integration to create solutions tailored to your research or development goals.

Interested in discussing your challenge? We'd be happy to explore the possibilities with you.