demcon-tsst-zurich-university
UZH Zurich

PLD cluster solution with sputtering chamber and customized loadlock

We installed a cluster solution consisting of a PLD system and a sputtering chamber, connected by a customized loadlock with storage, at UZH Zurich.

technical highlights.

  • Unique shared loadlock with storage, allowing in-vacuum sample transfer

  • Laser heating up to 1100℃1100℃ in the PLD chamber

  • Radiative heating up to 800℃ 800℃ with Δ𝑇<1%ΔT<1% in the sputtering chamber

  • Compact PLD and sputtering combination

looking to advance your thin-film research?

Whether you are developing new functional materials, scaling a deposition process, or building a custom thin-film research platform, Demcon TSST can help translate complex requirements into reliable and high-performance equipment.

Our team combines expertise in vacuum technology, thin-film deposition, automation and system integration to create solutions tailored to your research or development goals.

Interested in discussing your challenge? We'd be happy to explore the possibilities with you.